Analysis of Silicon Surface by Single Reflection ATR

Introduction

The attenuated total reflectance (ATR) method is widely used for FTIR analysis because the spectra obtained without performing sample pretreatment are comparable to those collected with traditional transmittance measurement of thin films (1μm), the spectral information from the sample surface is also obtained, and finally, the use of a single reflection ATR accessory allows easy analysis of minute objects (<1mm) and rough or curved surfaces which are difficult to perform using multi-reflection ATR accessories. We introduce here the analysis of a silicon surface as examples of showing the advantage of “good contact” between the sample and the ATR crystal afforded by the single reflection method.

November 15, 2005 GMT