Last update: November 9, 2020

Common ion source parts
Name P/N Qty Remarks
Abrasive cloth for cleaning 20 pcs. For cleaning the ion source (for ultrafine finishing)
PTFE tube 10m For introducing the reaction gas to the ion source (for CI and NCI)
Abrasive cloth, cut 1 pc. For cleaning the ion source (cut)
QP2010 SE/QP2010/PARVUM2 ion source
Name P/N Qty Remarks Applicable model Links Applicable models
CI/NCI repeller assembly 1 Shared by CI/NCI, including insulator bushes, heat treated QP2010 SE
QP2010
PARVUM2
EI repeller assembly 1 Including insulator bushes, heat treated QP2010 SE
QP2010
PARVUM2
CI ion source box (single unit) 1 Not including repeller assembly, heat treated QP2010 SE
QP2010
PARVUM2
EI ion source box (single unit) 1 Not including repeller assembly, heat treated QP2010 SE
NCI ion source box (single unit) 1 Not including repeller assembly, heat treated QP2010 SE
QP2010
PARVUM2
TQ8050/TQ8040/TQ8030/QP2020/QP2010 Ultra/QP2010 Plus ion source
Name P/N Qty Remarks Applicable model Links Applicable models
CI/NCI repeller assembly 1 Shared by CI/NCI, including insulator bushes, heat treated TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
EI repeller assembly 1 Including insulator bushes, heat treated TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
Filament 1 Shared by EI/CI/NCI TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
QP2010 SE
QP2010
PARVUM2
Insulator bush 1 Two are used in the repeller assembly. TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
QP2010 SE
QP2010
PARVUM2
CI ion source box (single unit) 1 Not including repeller assembly, heat treated TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
EI ion source box (single unit) 1 Not including repeller assembly, heat treated TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus
NCI ion source box (single unit) 1 Not including repeller assembly, heat treated TQ8050
TQ8040
TQ8030
QP2020
QP2010 Ultra
QP2010 Plus

Supplementary keywords: CI filament, NCI filament