System Functions

XPS X-ray Photoelectron Spectroscopy

  • High Resolution Spectroscopy and Selected Area Spectroscopy
  • Quantitative Parallel Imagingr
  • Charge Neutralisation
  • Large Sample Handling
  • Delay-Line Detecto

System Functions

X-ray photoelectron spectroscopy (XPS), also known as ESCA (electron spectroscopy for chemical analysis) is a surface analysis technique which provides both elemental and chemical state information virtually without restriction on the type of material which can be analysed.

 

System Functions