Measuring the Film Thickness of ITO and Perovskite Layers in Perovskite Solar Cells

User Benefits

- EDXRF spectroscopy enables simple, rapid, and nondestructive measurement of film thicknesses on the order of nanometers. - EDXRF can provide film thickness analysis results comparable to those obtained with the OLS laser microscope. - By specifying layer information, the thicknesses of multiple layers can be quantified.

Introduction

As larger perovskite solar cells with higher efficiencies continue to be achieved, it has become increasingly important to control the quality of ITO (indium tin oxide) films used as transparent electrodes. ITO films are transparent conductive films that offer a combination of both high visible-light transmittance and electrical conductivity. They allow incident light to pass through the film while also transmitting charges generated by photoelectric conversion to an external circuit. The thickness of the ITO film affects transmittance, sheet resistance, and other properties, which consequently influences device performance. Therefore, appropriate film-thickness control is essential. Energy dispersive X-ray fluorescence (EDX) spectrometers can measure the thickness of this ITO film nondestructively, without any pretreatment, and with a simple analytical procedure. This article describes analyzing the following samples: 1. ITO films 2. Perovskite/ITO films In addition, to evaluate the quantitative accuracy of the EDXRF system, Sample 1 (the ITO film) was also measured using the OLS5500 laser microscope (OLS) and the results were compared.

September 29, 2026 GMT