TOC-1000e S - Features
On-Line TOC Analyzer for Ultrapure Water
Superior detection sensitivity for hard-to-oxidize compounds
High Oxidation Capacity with Accurate Detection of Urea and Other Hard-to-Oxidize Compounds
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In semiconductor manufacturing, large volumes of ultrapure water are produced from various water sources. During this purification process, impurities must be removed to the greatest possible extent. Urea is particularly challenging to eliminate due to its hard-to-oxidize characteristics. Any residual urea in the ultrapure water can generate ammonia gas, which causes issues in the subsequent machining of semiconductor materials. Insufficient detection capability, with conventional on-line TOC analyzers with similar operating principles, has been a problem. With the TOC-1000e S, samples are exposed to high-energy shortwave light from an excimer lamp using the Active-Path configuration, enabling the high-sensitivity detection of urea and other hard-to-oxidize organic compounds.
Defective part on the circuit
Fast response to contamination events
Ensures Rapid Detection of Impurities
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Detecting the presence of impurities in ultrapure water at an early stage prevents defects in semiconductor materials. The TOC-1000e S features a simple measurement flow line, in which the excimer lamp and the electric conductivity meter are connected in series. Sample water continuously flows through the measurement line, allowing real-time detection of unexpected impurities.
Internal structure and measurement principle
Industry-leading compact design and lightweight build
Compact, Lightweight, and Easy to Install
Seamless Transfer to Measurement Points
The TOC-1000e S is small and only weighs approximately 3 kg. In addition to desktop use, it can be easily installed on walls or pipes with the optional bracket kit. For any setup, a vial sampler can be attached to one side of the instrument, enabling on-site calibration.
It can also be easily moved between measurement points and serve as a backup instrument during maintenance of active instruments.
High-Visibility Display and Indicators
With its large display and clear UI, the software delivers outstanding visibility and ease of operation, enhancing efficiency for routine checks, data output, and maintenance. The indicators show various aspects of the instrument status in different colors.
Monitor Display
Indicators
User-friendly operation for an efficient workflow
Maintenance-Free for One Year, and Tool-Free Maintenance
The configuration of the instrument is very straightforward and parts replacement is only required once a year.
The only parts requiring periodic replacement in the main unit are the excimer lamp and the pump head. Both can be accessed from the front of the instrument, removed, and installed easily without any tools.
Excimer lamp replacement
Pump head replacement
On-Site Calibration Using a Vial Sampler and
Certified Standard Solutions
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Calibration and validation can be easily performed on-site using an optional vial sampler and certified standard solutions. The procedures are straightforward and easy to follow.
In addition, on-line calibration against a reference instrument optimizes the quality control of ultrapure water when multiple instruments are in use. 
Certified Standard
Solutions
Stability Check Function 
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A stability check function is available to verify the stability of the instrument when on-line measurements resume after relocation or maintenance.
Supports a Variety of Data Output Formats and a Web Browser Function
Output Data in an Easy-to-View, User-Friendly Format
Data can be output from the eTOC to a USB flash drive in text format (CSV format) or PDF format.
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Text files
Comma-delimited (CSV) or tab-delimited. The data can be read into spreadsheet software.
Text files
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Daily reports (PDF files)
Daily measurement results can be summarized in easy-to-view reports with tables of numerical values and trend graphs.
Daily reports
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External input/output
Using the external input/output kit included as
standard, measurement values can be output as analog output (4 to 20 mA), or can be output as warnings or events with contact outputs.
Monitor Data Online from Any Location
Connect the TOC-1000e S to a network to check the measurement values from a remote location, using a PC or tablet. The data can be accessed using a Web browser, so special software is not required. The data can also be downloaded as a file.
An on-site visit is not required, even for remote or multiple instruments.
Mercury-Free Excimer Lamp
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TOC-1000e S is the world’s first on-line TOC analyzer to adopt an excimer lamp for oxidation. The excimer lamp delivers high-energy 172 nm light that can be switched instantly ON or OFF, minimizing lamp deterioration by activating only during oxidation. In addition, with Shimadzu's unique Active-Path configuration, samples are efficiently exposed to the high-energy light from the excimer lamp, ensuring complete oxidation of organic substances and exceptional measurement accuracy.
Active-Path Configuration
- Integrated light source and sample flow line
- The light source encloses the flow line rather than being separated from it, so the sample is efficiently exposed to UV light.
- The flow line has a simple shape, minimizing contamination and carryover.
- UV-blocking materials are used for the lamp casing. This prevents accidental eye exposure and ozone generation inside the instrument.
General Instrument Issues
- UV light does not efficiently reach the sample due to absorption by air.
- UV light has limited effectiveness in reaching areas far from the lamp.
- The oxygen in the air reacts with the UV light and ozone is inadvertently generated within the instrument.