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Applications
The TOC-1000e S on-line TOC analyzer for monitoring ultrapure water uses a unique measurement algorithm to achieve stable measurement of TOC concentrations below 1μg/L, which is required for semiconductor manufacturing processes. In particular, the high detection capability and responsiveness to hard-to-oxidize compounds such as urea, which are required in the cutting-edge semiconductors manufacturing process, greatly contribute to improving the yield in the manufacturing process.
The TOC-1000e S can detect urea and other hard-to-oxidize compounds with high sensitivity by irradiating samples with high-energy shortwave light emitted from an excimer lamp which has the Active-Path structure*. It offers both high sensitivity and easier operation, while maintaining the popular small size, light weight, and user-friendliness of the previous series.
